Aluminium Copper (AlCu) Sputtering Target

Xa kev nug

Khoom Description

Aluminium Copper sputtering lub hom phiaj yog zoo meej rau ntau qhov kev lag luam thiab kev siv, vim nws qhov siab hardness, tensile zog thiab lub teeb yuag. Nws feem ntau muaj 1-3% tooj liab cov ntsiab lus thiab muaj cov tshuaj zoo sib xws nrog Aluminium. AlCu muaj cov khoom siv kho tshuab siab, kev ua haujlwm zoo heev, thiab qhov kub thiab txias, yog li nws tuaj yeem yog cov khoom tsim nyog rau kev ua haujlwm siab Aluminium alloy. High purity AlCu alloy sputtering lub hom phiaj yuav siv tau nyob rau hauv ib tug ntau yam ntawm industrial teb los ntawm semiconductor thiab hluav taws xob ua hauj lwm Cheebtsam. Nrog 5N siab purity, uniform grain loj, qis cov pa oxygen, cov neeg siv kawg tuaj yeem tau txais cov nqi yaig tas li nrog rau siab purity thiab homogeneous nyias zaj duab xis txheej thaum txheej txheem PVD.

Hauv kev tsim cov khoom sib xyaw ua ke, nws yog qhov tshwm sim uas tshwm sim ntawm diffusion ntawm silicon rau hauv cov txheej txheem aluminium interconnect. Yog hais tias ib tug saturated concentration ntawm silicon ntxiv rau cov txhuas los ua ib qho txhuas silicon alloy, qhov teeb meem tuaj yeem txhim kho tau zoo. Yog li peb kuj tsim Aluminium silicon AlSi sputtering lub hom phiaj thiab Aluminium silicon tooj liab AlSiCu sputtering lub hom phiaj rau IC daim ntawv thov.

Qeb	Alloy Sputtering Target
Tshuaj Formula	AlCu
Kev sib xyaw	Aluminium Copper
Purity	99.9%,99.95%,99.99%
Cov duab	Phaj, Kem Hom Phiaj, arc cathodes, Custom-made
Txheej txheem ntau lawm	Lub tshuab nqus tsev Melting, PM
Muaj Qhov Loj	L Tsawg dua lossis sib npaug li 200mm, W Tsawg dua lossis sib npaug li 200mm